EXHIBIT 23.0

Consent of Independent Registered Public Accounting Firm

The Board of Directors
FSI International, Inc.:

We consent to incorporation by reference in the registration statements on Form S-8 (Nos. 33-29494, 33-39919, 33-33649, 33-33647, 33-39920, 33-42893, 33-77852, 33-77854, 33-60903, 333-30675, 333-19677, 333-19673, 333-01509, 333-50991, 333-94383, 333-96275, 333-61164, 333-104088, 333-113735, 333-122729 and 333-149852) and on Form S-3 (No. 333-86148) of FSI International, Inc. of our report dated November 3, 2008, relating to the consolidated balance sheets of FSI International, Inc. and subsidiaries as of August 30, 2008 and August 25, 2007, and the related consolidated statements of operations, stockholders’ equity and comprehensive loss, and cash flows for each of the years in the three-year period ended August 30, 2008, which report appears in the August 30, 2008 annual report on Form 10-K of FSI International, Inc.

Our report refers to the Company’s adoption of the provisions of Securities and Exchange Commission Staff Accounting Bulletin No. 108, Considering the Effects of Prior Year Misstatements when Quantifying Misstatements in Current Year Financial Statements, as of August 27, 2006.

/s/ KPMG LLP

Minneapolis, Minnesota
November 3, 2008