Exhibit 21.0

SUBSIDIARIES

	JURISDICTION OF
NAME	INCORPORATION
FSI International, Ltd.	Guam
FSI International Asia, Ltd.	Taiwan
FSI International (France) SARL	France
FSI International (Germany) GmbH	Germany
FSI International (Italy) S.r.l.	Italy
FSI International Netherlands B.V.	The Netherlands
FSI International (Holding) B.V.	The Netherlands
FSI International (UK) Limited	Scotland
FSI International (Shanghai) Co., Ltd.	Peoples Republic of China
FSI International (Korea) Co., Ltd.	Korea
FSI Malaysia SDN GHD	Malaysia
FSI International Semiconductor Equipment Pte Ltd	Singapore
SCD Mountain View, Inc.	Minnesota
Semiconductor Systems, Inc.	California

FSI International, Inc. also owns a 49% interest in m•FSI, LTD.