EXHIBIT 23.2

               CONSENT OF ERNST & YOUNG LLP, INDEPENDENT AUDITORS


We consent to the reference to our firm under the caption "Experts" included in
the proxy statement-prospectus of SpeedFam-IPEC, Inc. that is made a part of the
Registration Statement (Amendment No. 1 to Form S-4) and Prospectus of Novellus
Systems, Inc. for the registration of 7,521,456 shares of its common stock and
to the incorporation by reference therein of our report dated January 20, 2002,
with respect to the consolidated financial statements and schedule of Novellus
Systems, Inc. included in its Annual Report (Form 10-K) for the year ended
December 31, 2001, filed with the Securities and Exchange Commission.

/s/ Ernst & Young LLP

San Jose, California
October 3, 2002