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FAIR VALUE MEASUREMENTS (Details) (USD $)
12 Months Ended 12 Months Ended 3 Months Ended 12 Months Ended
Dec. 31, 2012
Dec. 31, 2011
Dec. 31, 2010
Dec. 31, 2012
Estimate of Fair Value, Fair Value Disclosure [Member]
Dec. 31, 2011
Estimate of Fair Value, Fair Value Disclosure [Member]
Dec. 31, 2011
Estimate of Fair Value, Fair Value Disclosure [Member]
Commercial paper [Member]
Dec. 31, 2012
Estimate of Fair Value, Fair Value Disclosure [Member]
Money market funds [Member]
Dec. 31, 2011
Estimate of Fair Value, Fair Value Disclosure [Member]
Money market funds [Member]
Dec. 31, 2011
Estimate of Fair Value, Fair Value Disclosure [Member]
Certificates of deposit [Member]
Dec. 31, 2012
Estimate of Fair Value, Fair Value Disclosure [Member]
Corporate securities [Member]
Dec. 31, 2011
Estimate of Fair Value, Fair Value Disclosure [Member]
Corporate securities [Member]
Dec. 31, 2012
Quoted Prices in Active Markets for Identical Assets (Level 1) [Member]
Dec. 31, 2011
Quoted Prices in Active Markets for Identical Assets (Level 1) [Member]
Dec. 31, 2011
Quoted Prices in Active Markets for Identical Assets (Level 1) [Member]
Commercial paper [Member]
Dec. 31, 2012
Quoted Prices in Active Markets for Identical Assets (Level 1) [Member]
Money market funds [Member]
Dec. 31, 2011
Quoted Prices in Active Markets for Identical Assets (Level 1) [Member]
Money market funds [Member]
Dec. 31, 2011
Quoted Prices in Active Markets for Identical Assets (Level 1) [Member]
Certificates of deposit [Member]
Dec. 31, 2012
Quoted Prices in Active Markets for Identical Assets (Level 1) [Member]
Corporate securities [Member]
Dec. 31, 2011
Quoted Prices in Active Markets for Identical Assets (Level 1) [Member]
Corporate securities [Member]
Dec. 31, 2012
Significant Other Observable Inputs (Level 2) [Member]
Dec. 31, 2011
Significant Other Observable Inputs (Level 2) [Member]
Dec. 31, 2011
Significant Other Observable Inputs (Level 2) [Member]
Commercial paper [Member]
Dec. 31, 2012
Significant Other Observable Inputs (Level 2) [Member]
Money market funds [Member]
Dec. 31, 2011
Significant Other Observable Inputs (Level 2) [Member]
Money market funds [Member]
Dec. 31, 2011
Significant Other Observable Inputs (Level 2) [Member]
Certificates of deposit [Member]
Dec. 31, 2012
Significant Other Observable Inputs (Level 2) [Member]
Corporate securities [Member]
Dec. 31, 2011
Significant Other Observable Inputs (Level 2) [Member]
Corporate securities [Member]
Dec. 31, 2012
Significant Unobservable Inputs (Level 3) [Member]
Dec. 31, 2011
Significant Unobservable Inputs (Level 3) [Member]
Sep. 30, 2012
Semi South [Member]
Mar. 31, 2012
Semi South [Member]
Dec. 31, 2012
Semi South [Member]
Significant Unobservable Inputs (Level 3) [Member]
Sep. 30, 2012
Contingent Purchase Commitment [Member]
Semi South [Member]
Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]                                                                  
Purchase Options Other                                                             $ 6,200,000    
Investments, Fair Value Disclosure           9,849,000 7,140,000 30,190,000 10,000,000 31,766,000 62,940,000     0 7,140,000 30,190,000 0 0 0     9,849,000 0 0 10,000,000 31,766,000 62,940,000            
Assets, Fair Value Disclosure       38,906,000 112,979,000             7,140,000 30,190,000             31,766,000 82,789,000                        
Asset Impairment Charges 33,745,000 0 0                                                     33,700,000      
Fair Value of Purchase Option on SemiSouth Loan                                                                 0
Initial Loan to SemiSouth                                                             18,000,000    
Fair value of note receivable                                                               13,400,000  
Fair Value, Assets Measured on Recurring Basis, Unobservable Input Reconciliation, Calculation [Roll Forward]                                                                  
Beginning balance                                                       0 0        
Purchases and issuances                                                       13,433,000 3,000,000        
Settlements                                                       (13,433,000) (3,000,000)        
Ending balance                                                       0 0        
Investment Income, Amortization of Discount                                                               $ 1,600,000