INVESTMENT IN THIRD PARTY (Details) (USD $)			1 Months Ended			3 Months Ended	12 Months Ended
	Dec. 31, 2011	Dec. 31, 2010	Jul. 31, 2011 SemiSouth [Member]	Jul. 31, 2011 Developed Technology Rights [Member]	Aug. 31, 2011 Developed Technology Rights [Member]	Dec. 31, 2011 Noncontrolling Interest [Member] SemiSouth [Member]	Dec. 31, 2011 Noncontrolling Interest [Member] SemiSouth [Member]	Mar. 31, 2011 Noncontrolling Interest [Member] SemiSouth [Member]	Oct. 22, 2010 Noncontrolling Interest [Member] SemiSouth [Member]
Schedule of Cost-method Investments [Line Items]
Cost-method Investment in SemiSouth						$ 7,000,000	$ 7,000,000		$ 7,000,000
Prepaid royalty to SemiSouth	10,000,000	10,000,000				10,000,000	10,000,000		10,000,000
Lease line maximum borrowing capacity						8,600,000	8,600,000	15,500,000
Lease line funded amount						8,500,000	8,500,000
Lease line funded amount, less payments withheld under arrangement to finance capital equipment						3,900,000	3,900,000
Lease line funded as deposits on equipment						4,600,000	4,600,000
Lease guaranty						2,500,000	2,500,000
Cost-method investment, ownership percentage in SemiSouth							less than 20%
Potential minimum purchase price									36,000,000
Multiple of level of quarterly revenues in fourth quarter of 2011						17
Investees proceeds from other financing activities			15,000,000
Contingent Purchase Commitment				15,000,000
Letter of credit issued to financing company					$ 15,000,000