X0201 3 2004-03-25 0 0000828119 THERMA WAVE INC twav 0001212401 SUH NAM P 1 0 0 0 Non-Qualified Stock Option(right to buy) 3.51 2008-03-25 2014-03-25 Common Stock, Par Value $0.01 per share 20000 D 25% of the option shares become exercisable on the first year anniversary of the grant date; 2.083% of the option shares become exercisable each month on the thirteenth through the forty eighth monthly anniversary of the grant date. Ray Christie, Power of Attorney 2004-04-02