-----BEGIN PRIVACY-ENHANCED MESSAGE-----
Proc-Type: 2001,MIC-CLEAR
Originator-Name: webmaster@www.sec.gov
Originator-Key-Asymmetric:
 MFgwCgYEVQgBAQICAf8DSgAwRwJAW2sNKK9AVtBzYZmr6aGjlWyK3XmZv3dTINen
 TWSM7vrzLADbmYQaionwg5sDW3P6oaM5D3tdezXMm7z1T+B+twIDAQAB
MIC-Info: RSA-MD5,RSA,
 HAfaoWqefjLn4PzqS49+1IW4/zdQm7yugzr1wPxQ4Y31MNm6mJQ/Cjtm6Pab6zUZ
 m2hlTVEKw46lw2qDlDK5DQ==

<SEC-DOCUMENT>0001207626-04-000001.txt : 20040402
<SEC-HEADER>0001207626-04-000001.hdr.sgml : 20040402
<ACCEPTANCE-DATETIME>20040402141728
ACCESSION NUMBER:		0001207626-04-000001
CONFORMED SUBMISSION TYPE:	3
PUBLIC DOCUMENT COUNT:		1
CONFORMED PERIOD OF REPORT:	20040325
FILED AS OF DATE:		20040402

ISSUER:		

	COMPANY DATA:	
		COMPANY CONFORMED NAME:			THERMA WAVE INC
		CENTRAL INDEX KEY:			0000828119
		STANDARD INDUSTRIAL CLASSIFICATION:	INDUSTRIAL INSTRUMENTS FOR MEASUREMENT, DISPLAY, AND CONTROL [3823]
		IRS NUMBER:				943000561
		STATE OF INCORPORATION:			DE
		FISCAL YEAR END:			0331

	BUSINESS ADDRESS:	
		STREET 1:		1250 RELIANCE WAY
		CITY:			FREMONT
		STATE:			CA
		ZIP:			94539
		BUSINESS PHONE:		5104903663

	MAIL ADDRESS:	
		STREET 1:		1250 RELIANCE WAY
		CITY:			FREMONT
		STATE:			CA
		ZIP:			94539

REPORTING-OWNER:	

	OWNER DATA:	
		COMPANY CONFORMED NAME:			TOMLINSON LAWRENCE
		CENTRAL INDEX KEY:			0001207626

	FILING VALUES:
		FORM TYPE:		3
		SEC ACT:		1934 Act
		SEC FILE NUMBER:	000-26911
		FILM NUMBER:		04713045

	BUSINESS ADDRESS:	
		STREET 1:		C/O HEWLETT-PACKARD CO
		STREET 2:		3000 HANOVER STREET
		CITY:			PALO ALTO
		STATE:			CA
		ZIP:			94304
		BUSINESS PHONE:		6508571501

	MAIL ADDRESS:	
		STREET 1:		C/O HEWLETT-PACKARD CO
		STREET 2:		3000 HANOVER STREET
		CITY:			PALO ALTO
		STATE:			CA
		ZIP:			94304
</SEC-HEADER>
<DOCUMENT>
<TYPE>3
<SEQUENCE>1
<FILENAME>primary_doc.xml
<DESCRIPTION>PRIMARY DOCUMENT
<TEXT>
<XML>
<?xml version="1.0"?>
<ownershipDocument>

    <schemaVersion>X0201</schemaVersion>

    <documentType>3</documentType>

    <periodOfReport>2004-03-25</periodOfReport>

    <noSecuritiesOwned>0</noSecuritiesOwned>

    <issuer>
        <issuerCik>0000828119</issuerCik>
        <issuerName>THERMA WAVE INC</issuerName>
        <issuerTradingSymbol>twav</issuerTradingSymbol>
    </issuer>

    <reportingOwner>
        <reportingOwnerId>
            <rptOwnerCik>0001207626</rptOwnerCik>
            <rptOwnerName>TOMLINSON LAWRENCE</rptOwnerName>
        </reportingOwnerId>
        <reportingOwnerAddress>
            <rptOwnerStreet1>C/O HEWLETT-PACKARD CO</rptOwnerStreet1>
            <rptOwnerStreet2>3000 HANOVER STREET</rptOwnerStreet2>
            <rptOwnerCity>PALO ALTO</rptOwnerCity>
            <rptOwnerState>CA</rptOwnerState>
            <rptOwnerZipCode>94304</rptOwnerZipCode>
            <rptOwnerStateDescription></rptOwnerStateDescription>
        </reportingOwnerAddress>
        <reportingOwnerRelationship>
            <isDirector>1</isDirector>
            <isOfficer>0</isOfficer>
            <isTenPercentOwner>0</isTenPercentOwner>
            <isOther>0</isOther>
        </reportingOwnerRelationship>
    </reportingOwner>

    <derivativeTable>
        <derivativeHolding>
            <securityTitle>
                <value>Non-Qualified Stock Option (right to buy)</value>
            </securityTitle>
            <conversionOrExercisePrice>
                <value>3.51</value>
            </conversionOrExercisePrice>
            <exerciseDate>
                <value>2008-03-25</value>
                <footnoteId id="F1"/>
            </exerciseDate>
            <expirationDate>
                <value>2014-03-25</value>
            </expirationDate>
            <underlyingSecurity>
                <underlyingSecurityTitle>
                    <value>Common Stock, Par Value $0.01 per share</value>
                </underlyingSecurityTitle>
                <underlyingSecurityShares>
                    <value>20000</value>
                </underlyingSecurityShares>
            </underlyingSecurity>
            <ownershipNature>
                <directOrIndirectOwnership>
                    <value>D</value>
                </directOrIndirectOwnership>
            </ownershipNature>
        </derivativeHolding>
    </derivativeTable>

    <footnotes>
        <footnote id="F1">25% of the option shares become exercisable on the first year anniversary of the grant date; 2.083% of the option shares become exercisable each month on the thirteenth through the forty eighth monthly anniversary of the grant date.</footnote>
    </footnotes>

    <ownerSignature>
        <signatureName>Ray Christie, Power of Attorney</signatureName>
        <signatureDate>2004-04-02</signatureDate>
    </ownerSignature>
</ownershipDocument>

</XML>
</TEXT>
</DOCUMENT>
</SEC-DOCUMENT>
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