Revenue Concentrations, Significant Customers, and Geographic Areas (Summary Of Revenue By Product Line) (Details) - USD ($) $ in Thousands	3 Months Ended
Mar. 31, 2022	Mar. 31, 2021
Concentration Risk [Line Items]
Revenues	$ 24,246	$ 17,732
High Precision 3D and 2D Sensors
Concentration Risk [Line Items]
Revenues	8,061	6,357
Inspection and Metrology Systems
Concentration Risk [Line Items]
Revenues	9,428	6,339
Semiconductor Sensors
Concentration Risk [Line Items]
Revenues	$ 6,757	$ 5,036

Amount of revenue recognized from goods sold, services rendered, insurance premiums, or other activities that constitute an earning process. Includes, but is not limited to, investment and interest income before deduction of interest expense when recognized as a component of revenue, and sales and trading gain (loss).

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+ Details