-----BEGIN PRIVACY-ENHANCED MESSAGE-----
Proc-Type: 2001,MIC-CLEAR
Originator-Name: webmaster@www.sec.gov
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 TWSM7vrzLADbmYQaionwg5sDW3P6oaM5D3tdezXMm7z1T+B+twIDAQAB
MIC-Info: RSA-MD5,RSA,
 Ioa7oizYT3qp30VmZdTuYtX2IdGeGDwyecd5YD/3Z2pDbP0bhtCsKTSFOCssKxmO
 gdDUXA9H1U4PHxyibi/XKw==

<SEC-DOCUMENT>0000950117-03-003876.txt : 20030828
<SEC-HEADER>0000950117-03-003876.hdr.sgml : 20030828
<ACCEPTANCE-DATETIME>20030828120635
ACCESSION NUMBER:		0000950117-03-003876
CONFORMED SUBMISSION TYPE:	4
PUBLIC DOCUMENT COUNT:		1
CONFORMED PERIOD OF REPORT:	20030826
FILED AS OF DATE:		20030828

ISSUER:		

	COMPANY DATA:	
		COMPANY CONFORMED NAME:			ZYGO CORP
		CENTRAL INDEX KEY:			0000730716
		STANDARD INDUSTRIAL CLASSIFICATION:	OPTICAL INSTRUMENTS & LENSES [3827]
		IRS NUMBER:				060864500
		STATE OF INCORPORATION:			DE
		FISCAL YEAR END:			0630

	BUSINESS ADDRESS:	
		STREET 1:		LAUREL BROOK RD
		CITY:			MIDDLEFIELD
		STATE:			CT
		ZIP:			06455
		BUSINESS PHONE:		8603478506

	MAIL ADDRESS:	
		STREET 1:		LAUREL BROOK ROAD
		CITY:			MIDDLEFIELD
		STATE:			CT
		ZIP:			06455

REPORTING-OWNER:	

	OWNER DATA:	
		COMPANY CONFORMED NAME:			LIEBMAN SEYMOUR
		CENTRAL INDEX KEY:			0001252287

	FILING VALUES:
		FORM TYPE:		4
		SEC ACT:		1934 Act
		SEC FILE NUMBER:	000-12944
		FILM NUMBER:		03870218

	BUSINESS ADDRESS:	
		STREET 1:		ZYGO CORP
		STREET 2:		LAUREL BROOK RD
		CITY:			MIDDLEFIELD
		STATE:			CT
		ZIP:			06455
		BUSINESS PHONE:		8603478506

	MAIL ADDRESS:	
		STREET 1:		CANON USA INC
		STREET 2:		ONE CANON PLAZA
		CITY:			LAKE SUCCESS
		STATE:			NY
		ZIP:			11042
</SEC-HEADER>
<DOCUMENT>
<TYPE>4
<SEQUENCE>1
<FILENAME>rsr_10085.xml
<DESCRIPTION>FORM 4
<TEXT>
<XML>
<?xml version="1.0"?>
<ownershipDocument>

    <schemaVersion>X0201</schemaVersion>

    <documentType>4</documentType>
    <periodOfReport>2003-08-26</periodOfReport>
    <issuer>
        <issuerCik>0000730716</issuerCik>
        <issuerName>ZYGO CORP</issuerName>
        <issuerTradingSymbol>ZIGO</issuerTradingSymbol>
    </issuer>

    <reportingOwner>
        <reportingOwnerId>
            <rptOwnerCik>0001252287</rptOwnerCik>
            <rptOwnerName>LIEBMAN SEYMOUR</rptOwnerName>
        </reportingOwnerId>
        <reportingOwnerAddress>
            <rptOwnerStreet1>237 WALKER PLACE</rptOwnerStreet1>
            <rptOwnerStreet2></rptOwnerStreet2>
            <rptOwnerCity>WEST HEMPSTEAD</rptOwnerCity>
            <rptOwnerState>NY</rptOwnerState>
            <rptOwnerZipCode>11552</rptOwnerZipCode>
            <rptOwnerStateDescription></rptOwnerStateDescription>
        </reportingOwnerAddress>
            <reportingOwnerRelationship>
        <isDirector>1</isDirector>
        <isOfficer>0</isOfficer>
        <isTenPercentOwner>0</isTenPercentOwner>
        <isOther>0</isOther>
    </reportingOwnerRelationship>
    </reportingOwner>

    <nonDerivativeTable>
    <nonDerivativeTransaction>
        <securityTitle>
            <value>Common Stock</value>
        </securityTitle>
        <transactionDate>
            <value>2003-08-26</value>
        </transactionDate>
    <transactionCoding>
        <transactionFormType>4</transactionFormType>
        <transactionCode>M</transactionCode>
        <equitySwapInvolved>0</equitySwapInvolved>
    </transactionCoding>
        <transactionAmounts>
            <transactionShares>
                <value>3000</value>
            </transactionShares>
            <transactionPricePerShare>
                <value>2.00</value>
            </transactionPricePerShare>
            <transactionAcquiredDisposedCode>
                <value>A</value>
            </transactionAcquiredDisposedCode>
        </transactionAmounts>
        <postTransactionAmounts>
            <sharesOwnedFollowingTransaction>
                <value>20500</value>
            </sharesOwnedFollowingTransaction>
        </postTransactionAmounts>
        <ownershipNature>
            <directOrIndirectOwnership>
                <value>D</value>
            </directOrIndirectOwnership>
        </ownershipNature>
    </nonDerivativeTransaction>

    <nonDerivativeTransaction>
        <securityTitle>
            <value>Common Stock</value>
        </securityTitle>
        <transactionDate>
            <value>2003-08-26</value>
        </transactionDate>
    <transactionCoding>
        <transactionFormType>4</transactionFormType>
        <transactionCode>S</transactionCode>
        <equitySwapInvolved>0</equitySwapInvolved>
    </transactionCoding>
        <transactionAmounts>
            <transactionShares>
                <value>3000</value>
            </transactionShares>
            <transactionPricePerShare>
                <value>9.23</value>
            </transactionPricePerShare>
            <transactionAcquiredDisposedCode>
                <value>D</value>
            </transactionAcquiredDisposedCode>
        </transactionAmounts>
        <postTransactionAmounts>
            <sharesOwnedFollowingTransaction>
                <value>17500</value>
            </sharesOwnedFollowingTransaction>
        </postTransactionAmounts>
        <ownershipNature>
            <directOrIndirectOwnership>
                <value>D</value>
            </directOrIndirectOwnership>
        </ownershipNature>
    </nonDerivativeTransaction>

    <nonDerivativeTransaction>
        <securityTitle>
            <value>Common Stock</value>
        </securityTitle>
        <transactionDate>
            <value>2003-08-26</value>
        </transactionDate>
    <transactionCoding>
        <transactionFormType>4</transactionFormType>
        <transactionCode>M</transactionCode>
        <equitySwapInvolved>0</equitySwapInvolved>
    </transactionCoding>
        <transactionAmounts>
            <transactionShares>
                <value>10000</value>
            </transactionShares>
            <transactionPricePerShare>
                <value>2.00</value>
            </transactionPricePerShare>
            <transactionAcquiredDisposedCode>
                <value>A</value>
            </transactionAcquiredDisposedCode>
        </transactionAmounts>
        <postTransactionAmounts>
            <sharesOwnedFollowingTransaction>
                <value>27500</value>
            </sharesOwnedFollowingTransaction>
        </postTransactionAmounts>
        <ownershipNature>
            <directOrIndirectOwnership>
                <value>D</value>
            </directOrIndirectOwnership>
        </ownershipNature>
    </nonDerivativeTransaction>

    <nonDerivativeTransaction>
        <securityTitle>
            <value>Common Stock</value>
        </securityTitle>
        <transactionDate>
            <value>2003-08-26</value>
        </transactionDate>
    <transactionCoding>
        <transactionFormType>4</transactionFormType>
        <transactionCode>S</transactionCode>
        <equitySwapInvolved>0</equitySwapInvolved>
    </transactionCoding>
        <transactionAmounts>
            <transactionShares>
                <value>10000</value>
            </transactionShares>
            <transactionPricePerShare>
                <value>9.20</value>
            </transactionPricePerShare>
            <transactionAcquiredDisposedCode>
                <value>D</value>
            </transactionAcquiredDisposedCode>
        </transactionAmounts>
        <postTransactionAmounts>
            <sharesOwnedFollowingTransaction>
                <value>17500</value>
            </sharesOwnedFollowingTransaction>
        </postTransactionAmounts>
        <ownershipNature>
            <directOrIndirectOwnership>
                <value>D</value>
            </directOrIndirectOwnership>
        </ownershipNature>
    </nonDerivativeTransaction>

    <nonDerivativeTransaction>
        <securityTitle>
            <value>Common Stock</value>
        </securityTitle>
        <transactionDate>
            <value>2003-08-26</value>
        </transactionDate>
    <transactionCoding>
        <transactionFormType>4</transactionFormType>
        <transactionCode>M</transactionCode>
        <equitySwapInvolved>0</equitySwapInvolved>
    </transactionCoding>
        <transactionAmounts>
            <transactionShares>
                <value>12000</value>
            </transactionShares>
            <transactionPricePerShare>
                <value>2.00</value>
            </transactionPricePerShare>
            <transactionAcquiredDisposedCode>
                <value>A</value>
            </transactionAcquiredDisposedCode>
        </transactionAmounts>
        <postTransactionAmounts>
            <sharesOwnedFollowingTransaction>
                <value>29500</value>
            </sharesOwnedFollowingTransaction>
        </postTransactionAmounts>
        <ownershipNature>
            <directOrIndirectOwnership>
                <value>D</value>
            </directOrIndirectOwnership>
        </ownershipNature>
    </nonDerivativeTransaction>

    </nonDerivativeTable>
    <derivativeTable>
    <derivativeTransaction>
        <securityTitle>
            <value>Stock Option</value>
        </securityTitle>
        <conversionOrExercisePrice>
            <value>2.00</value>
        </conversionOrExercisePrice>
        <transactionDate>
            <value>2003-08-26</value>
        </transactionDate>
    <transactionCoding>
        <transactionFormType>4</transactionFormType>
        <transactionCode>M</transactionCode>
        <equitySwapInvolved>0</equitySwapInvolved>
    </transactionCoding>
        <transactionAmounts>
            <transactionShares>
                <value>3000</value>
            </transactionShares>
            <transactionPricePerShare>
                <value>0</value>
            </transactionPricePerShare>
            <transactionAcquiredDisposedCode>
                <value>D</value>
            </transactionAcquiredDisposedCode>
        </transactionAmounts>
        <exerciseDate>
            <value>1995-08-24</value>
            <footnoteId id="F1"/>
        </exerciseDate>
        <expirationDate>
            <value>2004-08-24</value>
        </expirationDate>
        <underlyingSecurity>
            <underlyingSecurityTitle>
                <value>Common Stock</value>
            </underlyingSecurityTitle>
            <underlyingSecurityShares>
                <value>3000</value>
            </underlyingSecurityShares>
        </underlyingSecurity>
        <postTransactionAmounts>
            <sharesOwnedFollowingTransaction>
                <value>47000</value>
            </sharesOwnedFollowingTransaction>
        </postTransactionAmounts>
        <ownershipNature>
            <directOrIndirectOwnership>
                <value>D</value>
            </directOrIndirectOwnership>
        </ownershipNature>
    </derivativeTransaction>

    <derivativeTransaction>
        <securityTitle>
            <value>Stock Option</value>
        </securityTitle>
        <conversionOrExercisePrice>
            <value>2.00</value>
        </conversionOrExercisePrice>
        <transactionDate>
            <value>2003-08-26</value>
        </transactionDate>
    <transactionCoding>
        <transactionFormType>4</transactionFormType>
        <transactionCode>M</transactionCode>
        <equitySwapInvolved>0</equitySwapInvolved>
    </transactionCoding>
        <transactionAmounts>
            <transactionShares>
                <value>10000</value>
            </transactionShares>
            <transactionPricePerShare>
                <value>0</value>
            </transactionPricePerShare>
            <transactionAcquiredDisposedCode>
                <value>D</value>
            </transactionAcquiredDisposedCode>
        </transactionAmounts>
        <exerciseDate>
            <value>1995-08-24</value>
            <footnoteId id="F1"/>
        </exerciseDate>
        <expirationDate>
            <value>2004-08-24</value>
        </expirationDate>
        <underlyingSecurity>
            <underlyingSecurityTitle>
                <value>Common Stock</value>
            </underlyingSecurityTitle>
            <underlyingSecurityShares>
                <value>10000</value>
            </underlyingSecurityShares>
        </underlyingSecurity>
        <postTransactionAmounts>
            <sharesOwnedFollowingTransaction>
                <value>37000</value>
            </sharesOwnedFollowingTransaction>
        </postTransactionAmounts>
        <ownershipNature>
            <directOrIndirectOwnership>
                <value>D</value>
            </directOrIndirectOwnership>
        </ownershipNature>
    </derivativeTransaction>

    <derivativeTransaction>
        <securityTitle>
            <value>Stock Option</value>
        </securityTitle>
        <conversionOrExercisePrice>
            <value>2.00</value>
        </conversionOrExercisePrice>
        <transactionDate>
            <value>2003-08-26</value>
        </transactionDate>
    <transactionCoding>
        <transactionFormType>4</transactionFormType>
        <transactionCode>M</transactionCode>
        <equitySwapInvolved>0</equitySwapInvolved>
    </transactionCoding>
        <transactionAmounts>
            <transactionShares>
                <value>12000</value>
            </transactionShares>
            <transactionPricePerShare>
                <value>0</value>
            </transactionPricePerShare>
            <transactionAcquiredDisposedCode>
                <value>D</value>
            </transactionAcquiredDisposedCode>
        </transactionAmounts>
        <exerciseDate>
            <value>1995-08-24</value>
            <footnoteId id="F1"/>
        </exerciseDate>
        <expirationDate>
            <value>2004-08-24</value>
        </expirationDate>
        <underlyingSecurity>
            <underlyingSecurityTitle>
                <value>Common Stock</value>
            </underlyingSecurityTitle>
            <underlyingSecurityShares>
                <value>12000</value>
            </underlyingSecurityShares>
        </underlyingSecurity>
        <postTransactionAmounts>
            <sharesOwnedFollowingTransaction>
                <value>25000</value>
            </sharesOwnedFollowingTransaction>
        </postTransactionAmounts>
        <ownershipNature>
            <directOrIndirectOwnership>
                <value>D</value>
            </directOrIndirectOwnership>
        </ownershipNature>
    </derivativeTransaction>

    </derivativeTable>
    <footnotes>
        <footnote id="F1">Exercisable in equal installments over a five-year period commencing on the date noted.</footnote>
    </footnotes>


    <ownerSignature>
        <signatureName>Seymour Liebman</signatureName>
        <signatureDate>2003-08-28</signatureDate>
    </ownerSignature>

</ownershipDocument>

</XML>
</TEXT>
</DOCUMENT>
</SEC-DOCUMENT>
-----END PRIVACY-ENHANCED MESSAGE-----