Segment and Major Customer Information (Tables)

6 Months Ended

Dec. 31, 2013

Segment Reporting [Abstract]

Schedule of Segment Reporting Information, by Segment [Table Text Block]

The following table sets forth segment net revenue, gross profit and gross margin for the three and six months ended December 31, 2013 and 2012:

	Three Months Ended December 31,						Six Months Ended December 31,
	2013			2012			2013			2012
Metrology Solutions
Net revenue	$	33,875		$	21,416		$	60,319		$	47,294
Gross profit	$	20,552		$	11,595		$	35,169		$	25,928
Gross margin		61	%		54	%		58	%		55	%
Optical Systems
Net revenue	$	14,286		$	13,219		$	27,960		$	27,547
Gross profit	$	4,244		$	3,688		$	7,964		$	6,848
Gross margin		30	%		28	%		28	%		25	%
Total
Net revenue	$	48,161		$	34,635		$	88,279		$	74,841
Gross profit	$	24,796		$	15,283		$	43,133		$	32,776
Gross margin		51	%		44	%		49	%		44	%

Schedule of Revenue from External Customers and Long-Lived Assets, by Geographical Areas [Table Text Block]

The following table sets forth revenue by geographic area:

	Three Months Ended December 31,				Six Months Ended December 31,
	2013		2012		2013		2012
Americas	$	20,850	$	19,755	$	39,944	$	38,618
Japan		16,710		5,336		25,511		11,667
China		4,104		3,498		7,852		11,036
Europe		3,790		4,397		9,061		9,219
Pacific Rim		2,707		1,649		5,911		4,301
Total	$	48,161	$	34,635	$	88,279	$	74,841