QUARTERLY RESULTS (Unaudited) (Details) - Schedule of Quarterly Financial Information (USD $) In Thousands, except Per Share data, unless otherwise specified	3 Months Ended								12 Months Ended
	Jun. 30, 2013	Mar. 31, 2013	Dec. 31, 2012	Sep. 30, 2012	Jun. 30, 2012	Mar. 31, 2012	Dec. 31, 2011	Sep. 30, 2011	Jun. 30, 2013	Jun. 30, 2012	Jun. 30, 2011
Schedule of Quarterly Financial Information [Abstract]
Net revenue	$ 40,021	$ 34,533	$ 34,635	$ 40,206	$ 44,333	$ 38,472	$ 40,040	$ 43,992	$ 149,395	$ 166,837	$ 150,126
Gross profit	17,655	15,260	15,283	17,493	21,011	19,440	19,642	21,617	65,691	81,710	70,793
Net earnings	2,772	1,532	1,682	2,994	25,412	5,926	6,757	6,976	8,980	45,071	20,683
Net earnings attributable to Zygo Corporation	$ 2,518	$ 1,366	$ 1,579	$ 2,388	$ 24,964	$ 5,407	$ 6,178	$ 6,469	$ 7,851	$ 43,018	$ 19,079
Net earnings attributable to Zygo Corporation per basic common share (in Dollars per share)	$ 0.14	$ 0.07	$ 0.09	$ 0.13	$ 1.37	$ 0.30	$ 0.34	$ 0.36	$ 0.43	$ 2.39	$ 1.08
Net earnings attributable to Zygo Corporation per diluted common share (in Dollars per share)	$ 0.13	$ 0.07	$ 0.08	$ 0.13	$ 1.32	$ 0.29	$ 0.33	$ 0.35	$ 0.41	$ 2.30	$ 1.05