Changes in Zygo Corporation's Ownership Interest in Subsidiary (Detail) - Equity of changes in ownership interest (USD $) In Thousands, unless otherwise specified	3 Months Ended		9 Months Ended
	Mar. 31, 2013	Mar. 31, 2012	Mar. 31, 2013	Mar. 31, 2012
Net income attributable to Zygo Corporation	$ 1,366	$ 5,407	$ 5,333	$ 18,054
Transfers to the noncontrolling interest
Decrease in Zygo Corporation paid in-capital for purchase of noncontrolling interest			2,749
Net transfers to noncontrolling interest			2,749
Change from net income attributable to Zygo Corporation shareholders and transfers to noncontrolling interest			$ 2,584	$ 18,054