CONDENSED CONSOLIDATED STATEMENTS OF OPERATIONS (USD $) In Thousands, except Share data, unless otherwise specified	3 Months Ended
	Sep. 30, 2012	Sep. 30, 2011
Net revenue	$ 40,206	$ 43,992
Cost of goods sold	22,713	22,375
Gross profit	17,493	21,617
Selling, general and administrative expenses	8,521	9,463
Research, development and engineering expenses	4,581	4,062
Operating profit	4,391	8,092
Other income (expense)
Miscellaneous income (expense), net	36	(330)
Total other income (expense)	36	(330)
Income before income taxes, including noncontrolling interests	4,427	7,762
Income tax expense	(1,433)	(786)
Net income including noncontrolling interests	2,994	6,976
Less: Net income attributable to noncontrolling interests	606	507
Net income attributable to Zygo Corporation	$ 2,388	$ 6,469
Earnings per share attributable to Zygo Corporation
Basic earnings per share (in Dollars per share)	$ 0.13	$ 0.36
Diluted earnings per share (in Dollars per share)	$ 0.13	$ 0.35
Weighted average shares outstanding
Basic shares (in Shares)	18,341,320	17,799,754
Diluted shares (in Shares)	19,047,104	18,353,381