QUARTERLY RESULTS (UNAUDITED) (Detail) - Schedule Of Quarterly Financial Information (USD $) In Thousands, except Per Share data, unless otherwise specified	3 Months Ended								12 Months Ended
	Jun. 30, 2012	Mar. 31, 2012	Dec. 31, 2011	Sep. 30, 2011	Jun. 30, 2011	Mar. 31, 2011	Dec. 31, 2010	Sep. 30, 2010	Jun. 30, 2012	Jun. 30, 2011	Jun. 30, 2010
Net revenues	$ 44,333	$ 38,472	$ 40,040	$ 43,992	$ 42,686	$ 40,235	$ 36,086	$ 31,119	$ 166,837	$ 150,126	$ 101,330
Gross profit	21,011	19,440	19,642	21,617	20,832	18,864	16,894	14,203	81,710	70,793	41,969
Net earnings	25,412	5,926	6,757	6,976	6,503	4,834	6,090	3,256	45,071	20,683	(5,337)
Net earnings from continuing operations attributable to Zygo Corporation	0	0	0	0	6,104	4,473	5,774	2,637	45,071	20,592	(2,668)
Net earnings attributable to Zygo Corporation	$ 24,964	$ 5,407	$ 6,178	$ 6,469	$ 6,104	$ 4,473	$ 5,774	$ 2,728	$ 43,018	$ 19,079	$ (6,294)
Net earnings attributable to Zygo Corporation per basic common share (in Dollars per share)	$ 1.37	$ 0.30	$ 0.34	$ 0.36	$ 0.34	$ 0.25	$ 0.33	$ 0.16	$ 2.39	$ 1.08	$ (0.37)
Net earnings attributable to Zygo Corporation per diluted common share (in Dollars per share)	$ 1.32	$ 0.29	$ 0.33	$ 0.35	$ 0.33	$ 0.24	$ 0.32	$ 0.16	$ 2.30	$ 1.05	$ (0.37)