SHARE-BASED COMPENSATION PLANS (Detail) (USD $) In Thousands, except Per Share data, unless otherwise specified	12 Months Ended
	Jun. 30, 2012	Jun. 30, 2011	Jun. 30, 2010
Share-based Compensation Arrangement by Share-based Payment Award, Number of Shares Authorized (in Shares)	1,650,000
Share-based Compensation Arrangement by Share-based Payment Award, Number of Shares Available for Grant (in Shares)	1,573,074
Percentage Of Vested Options And Grants Of Restricted Stock Units	25.00%
Description Of Restricted Stock Awards Granted Prior	Restricted stock awards granted prior to January 1, 2011 under the Zygo Corporation 2002 Equity Incentive Plan ("2002 Plan"), as amended in 2006, vest 50% after three years and 50% after four years.
Share-based Compensation Arrangement by Share-based Payment Award, Equity Instruments Other than Options, Grants in Period (in Shares)	176,812	362,500	309,000
Share-based Compensation Arrangement by Share-based Payment Award, Options, Grants in Period, Weighted Average Grant Date Fair Value (in Dollars per share)	$ 7.21	$ 5.68	$ 4.45
Share-based Compensation	$ 4,128	$ 3,965	$ 2,492
Employee Service Share-based Compensation, Tax Benefit from Compensation Expense	1,486	1,427	897
Increase Cost of Goods Sold	790	650	316
Increase Selling, General And Administrative Expenses	2,708	2,416	1,770
Increase Research, Development And Engineering Expenses	630	899	406
Share-based Compensation Arrangement by Share-based Payment Award, Options, Outstanding, Intrinsic Value	8,506
Share-based Compensation Arrangement by Share-based Payment Award, Options, Outstanding, Weighted Average Remaining Contractual Term	6 years 146 days
Share-based Compensation Arrangement by Share-based Payment Award, Options, Exercisable, Intrinsic Value	4,763
Share-based Compensation Arrangement by Share-based Payment Award, Options, Exercisable, Weighted Average Remaining Contractual Term	4 years 292 days
Employee Service Share-based Compensation, Nonvested Awards, Total Compensation Cost Not yet Recognized, Stock Options	1,475
Employee Service Share-based Compensation, Nonvested Awards, Total Compensation Cost Not yet Recognized, Period for Recognition	1 year 292 days
Share-based Compensation Arrangement by Share-based Payment Award, Options, Exercises in Period, Total Intrinsic Value	2,823	449	109
Share-based Compensation Arrangement by Share-based Payment Award, Options, Vested in Period, Fair Value	803	959	478
Tax Benefit from Stock Options Exercised	2,629	1,834	520
Restricted Stock Units (RSUs) [Member]
Share-based Compensation Arrangement by Share-based Payment Award, Number of Shares Available for Grant (in Shares)	1,838,623
Employee Service Share-based Compensation, Nonvested Awards, Total Compensation Cost Not yet Recognized, Period for Recognition	1 year 292 days
Employee Service Share-based Compensation, Nonvested Awards, Total Compensation Cost Not yet Recognized, Share-based Awards Other than Options	$ 3,290
Non employee Director [Member]
Share-based Compensation Arrangement by Share-based Payment Award, Equity Instruments Other than Options, Grants in Period (in Shares)	5,000
Non employee Chariman [Member]
Share-based Compensation Arrangement by Share-based Payment Award, Equity Instruments Other than Options, Grants in Period (in Shares)	7,500
Each New Nonemployee Director [Member]
Share-based Compensation Arrangement by Share-based Payment Award, Equity Instruments Other than Options, Grants in Period (in Shares)	16,000