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ACQUISITIONS (Detail) - Business Acquisition ProForma Information (USD $) In Thousands, except Per Share data, unless otherwise specified	12 Months Ended
	Jun. 30, 2010
Net revenues (in Dollars)	$ 101,330
Net loss attributable to Zygo Corporation (in Dollars)	$ (3,565)
Loss per share amounts:
Basic and Diluted - Loss per share	$ (0.21)
Diluted - Loss per share	$ (0.21)

- Definition

The pro forma basic net income per share for a period as if the business combination or combinations had been completed at the beginning of a period.

+ References+ Details

- Definition

The pro forma diluted net income per share for a period as if the business combination or combinations had been completed at the beginning of a period.

+ References+ Details