Exhibit

We consent to the incorporation by reference in this registration statement on Form S-8 of Electro Scientific Industries, Inc. of our report dated June 26, 2015 with respect to the consolidated statements of operations, comprehensive loss, shareholders’ equity, and cash flows of Electro Scientific Industries, Inc., before the effects of the adjustments applied to the segment disclosures as more fully described in Note 25 to the consolidated financial statements for the year ended March 28, 2015, which report appears in the April 1, 2017 annual report on Form 10-K of Electro Scientific Industries, Inc.