Inventories, Net (Tables)

3 Months Ended

Mar. 31, 2020

Inventory Disclosure [Abstract]

Schedule of Inventories, Net

	December 31,		March 31,
	2019		2020
	(In thousands)
Raw materials	$	2,941	$	3,104
Work in process		11,771		12,237
Finished products		3,636		3,621
Total	$	18,348	$	18,962