Inventories, Net (Tables)

3 Months Ended

Mar. 31, 2016

Inventory Disclosure [Abstract]

Schedule of Inventories, Net

	December 31,		March 31,
	2015		2016
	(In thousands)
Raw materials	$	2,807	$	2,840
Work in process		9,346		9,046
Finished products		2,945		2,533
Total	$	15,098	$	14,419