Inventories, Net (Tables)

12 Months Ended

Dec. 31, 2014

Inventory Disclosure [Abstract]

Schedule of Inventories, Net

	December 31,
	2013		2014
	(In thousands)
Raw materials	$	3,565	$	3,393
Work in process		6,696		10,271
Finished products		2,974		3,199
Total	$	13,235	$	16,863