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Inventories, Net (Tables)
12 Months Ended
Dec. 31, 2021
Inventory Disclosure [Abstract]  
Schedule of Inventories, Net

December 31, 

    

2020

    

2021

(In thousands)

Raw materials

$

3,220

$

5,042

Work in process

 

11,668

 

16,767

Finished products

 

3,449

 

3,833

Total

$

18,337

$

25,642