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Goodwill - Additional Information (Details) - USD ($)
12 Months Ended
Sep. 30, 2020
Sep. 30, 2018
Semiconductor    
Goodwill [Line Items]    
Impairment of goodwill $ 0  
SiC/LED    
Goodwill [Line Items]    
Impairment of goodwill $ 0  
Solar    
Goodwill [Line Items]    
Impairment of goodwill   $ 5,700,000