Summary of Operations and Significant Accounting Policies - Revenue Recognition - Additional Information (Details)	12 Months Ended
Sep. 30, 2020
Disaggregation of Revenue [Line Items]
Practical expedient, financing component	true
Period of contract	1 year
Practical expedient, incremental cost of obtaining contract	true
Amortization period	1 year
Minimum \| Equipment Sales
Disaggregation of Revenue [Line Items]
Warranty period	12 months
Maximum \| Equipment Sales
Disaggregation of Revenue [Line Items]
Warranty period	36 months

Contract With Customer, Amortization Period

No definition available.

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- Definition

Contract With Customer, Term Of Contract

+ References

No definition available.

+ Details

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Namespace Prefix:	asys_
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Balance Type:	na
Period Type:	duration

- Definition

Equipment assurance warranty period.

+ References

No definition available.

+ Details

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Namespace Prefix:	asys_
Data Type:	xbrli:durationItemType
Balance Type:	na
Period Type:	duration

- Definition

Line items represent financial concepts included in a table. These concepts are used to disclose reportable information associated with domain members defined in one or many axes to the table.

+ References

No definition available.

+ Details

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Namespace Prefix:	us-gaap_
Data Type:	xbrli:stringItemType
Balance Type:	na
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- Definition

Indicates (true false) whether practical expedient was elected not to adjust consideration for effect of financing component when transfer and customer payment for product or service occurs within one year or less.

+ References

Reference 1: http://www.xbrl.org/2003/role/disclosureRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 606
-SubTopic 10
-Section 50
-Paragraph 22
-URI http://asc.fasb.org/extlink&oid=121604090&loc=SL49130569-203045

+ Details

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Namespace Prefix:	us-gaap_
Data Type:	xbrli:booleanItemType
Balance Type:	na
Period Type:	duration

- Definition

Indicates (true false) whether practical expedient was elected to recognize incremental cost of obtaining contract as expense when incurred if amortization period would have been one year or less.

+ References

Reference 1: http://www.xbrl.org/2003/role/disclosureRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 340
-SubTopic 40
-Section 50
-Paragraph 5
-URI http://asc.fasb.org/extlink&oid=68051541&loc=SL51790836-203054

Reference 2: http://www.xbrl.org/2003/role/disclosureRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 606
-SubTopic 10
-Section 50
-Paragraph 22
-URI http://asc.fasb.org/extlink&oid=121604090&loc=SL49130569-203045

+ Details

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Period Type:	duration

- Details

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