Benefit Plans	12 Months Ended
Sep. 30, 2020
Compensation And Retirement Disclosure [Abstract]
Benefit Plans	14. Benefit Plans We have retirement plans covering substantially all our employees. The principal plans are our defined contribution plan that covers substantially all of our employees in the United States and the multi-employer plan for hourly union employees in Pennsylvania. Both plans are insignificant. Defined Contribution Plan – Domestic employees of Amtech and its subsidiaries who meet certain eligibility requirements may participate, at the employee’s option, in the Amtech Systems, Inc. 401(k) Plan (the “401(k) Plan”). The 401(k) Plan is a defined contribution plan subject to the provisions of ERISA. We match employee contributions to the 401(k) Plan equal to 60% of the employees’ elective deferrals, up to 3.6% of the participants’ eligible compensation each payroll period. The match expense was $0.3 million, $0.3 million and $0.4 million in 2020, 2019 and 2018, respectively. Pension Plan – Our hourly union employees in Pennsylvania participate in a multi-employer pension plan, the NIGPP, determined in accordance with the union agreement between PR Hoffman and the United Automobile, Aerospace and Agriculture Implement Workers of America. The agreement was renewed in 2019 for a three-year term that expires September 30, 2022. Every company participating in the plan pays a contribution per hour worked for each employee of the company that is eligible to participate in the NIGPP. Our contribution rate is $2.48 per hour, per employee. Our contributions to the NIGPP were $44,000, $53,000 and $64,000 in 2020, 2019 and 2018, respectively.

Benefit Plans

12 Months Ended

Sep. 30, 2020

Compensation And Retirement Disclosure [Abstract]

14. Benefit Plans

We have retirement plans covering substantially all our employees. The principal plans are our defined contribution plan that covers substantially all of our employees in the United States and the multi-employer plan for hourly union employees in Pennsylvania. Both plans are insignificant.

Defined Contribution Plan – Domestic employees of Amtech and its subsidiaries who meet certain eligibility requirements may participate, at the employee’s option, in the Amtech Systems, Inc. 401(k) Plan (the “401(k) Plan”). The 401(k) Plan is a defined contribution plan subject to the provisions of ERISA. We match employee contributions to the 401(k) Plan equal to 60% of the employees’ elective deferrals, up to 3.6% of the participants’ eligible compensation each payroll period. The match expense was $0.3 million, $0.3 million and $0.4 million in 2020, 2019 and 2018, respectively.

Pension Plan – Our hourly union employees in Pennsylvania participate in a multi-employer pension plan, the NIGPP, determined in accordance with the union agreement between PR Hoffman and the United Automobile, Aerospace and Agriculture Implement Workers of America. The agreement was renewed in 2019 for a three-year term that expires September 30, 2022. Every company participating in the plan pays a contribution per hour worked for each employee of the company that is eligible to participate in the NIGPP. Our contribution rate is $2.48 per hour, per employee. Our contributions to the NIGPP were $44,000, $53,000 and $64,000 in 2020, 2019 and 2018, respectively.