<SEC-DOCUMENT>0001209191-23-046145-index.html : 20230816
<SEC-HEADER>0001209191-23-046145.hdr.sgml : 20230816
<ACCEPTANCE-DATETIME>20230816202641
ACCESSION NUMBER:		0001209191-23-046145
CONFORMED SUBMISSION TYPE:	4
PUBLIC DOCUMENT COUNT:		1
CONFORMED PERIOD OF REPORT:	20230814
FILED AS OF DATE:		20230816
DATE AS OF CHANGE:		20230816

REPORTING-OWNER:	

	OWNER DATA:	
		COMPANY CONFORMED NAME:			DAIGLE ROBERT C
		CENTRAL INDEX KEY:			0001267540

	FILING VALUES:
		FORM TYPE:		4
		SEC ACT:		1934 Act
		SEC FILE NUMBER:	000-11412
		FILM NUMBER:		231179618

	MAIL ADDRESS:	
		STREET 1:		C/O:  ROGERS CORPORATION
		STREET 2:		ONE TECHNOLOGY DRIVE PO BOX 188
		CITY:			ROGERS
		STATE:			CT
		ZIP:			06263-0188

ISSUER:		

	COMPANY DATA:	
		COMPANY CONFORMED NAME:			AMTECH SYSTEMS INC
		CENTRAL INDEX KEY:			0000720500
		STANDARD INDUSTRIAL CLASSIFICATION:	SPECIAL INDUSTRY MACHINERY, NEC [3559]
		IRS NUMBER:				860411215
		STATE OF INCORPORATION:			AZ
		FISCAL YEAR END:			0930

	BUSINESS ADDRESS:	
		STREET 1:		131 SOUTH CLARK DRIVE
		CITY:			TEMPE
		STATE:			AZ
		ZIP:			85288
		BUSINESS PHONE:		4809675146

	MAIL ADDRESS:	
		STREET 1:		131 SOUTH CLARK DRIVE
		CITY:			TEMPE
		STATE:			AZ
		ZIP:			85288

	FORMER COMPANY:	
		FORMER CONFORMED NAME:	QUARTZ ENGINEERING & MATERIALS INC
		DATE OF NAME CHANGE:	19870715
</SEC-HEADER>
<DOCUMENT>
<TYPE>4
<SEQUENCE>1
<FILENAME>doc4.xml
<DESCRIPTION>FORM 4 SUBMISSION
<TEXT>
Document 1 - file: doc4.html

Document 1 - RAW XML: doc4.xml

</DOCUMENT>
</SEC-DOCUMENT>