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Document and Entity Information - USD ($)
 12 Months Ended
Sep. 30, 2025
Dec. 03, 2025
Mar. 31, 2025
Cover [Abstract]      
Document Type 10-K    
Amendment Flag false    
Document Period End Date Sep. 30, 2025    
Document Fiscal Year Focus 2025    
Document Fiscal Period Focus FY    
Entity Registrant Name AMTECH SYSTEMS, INC.    
Entity Central Index Key 0000720500    
Current Fiscal Year End Date --09-30    
Entity Filer Category Non-accelerated Filer    
Entity Small Business true    
Entity Emerging Growth Company false    
Entity Voluntary Filers No    
Entity Well-known Seasoned Issuer No    
Entity Public Float     $ 54,346,382
Entity Common Stock, Shares Outstanding   14,356,797  
Entity Current Reporting Status Yes    
Entity Shell Company false    
Entity File Number 0-11412    
Entity Tax Identification Number 86-0411215    
Entity Address, Address Line One 58 South River Drive Suite 370    
Entity Address, City or Town Tempe    
Entity Address, State or Province AZ    
Entity Address, Postal Zip Code 85288    
City Area Code 480    
Local Phone Number 967-5146    
Entity Interactive Data Current Yes    
Title of 12(b) Security Common Stock, par value $0.01 per share    
Trading Symbol ASYS    
Security Exchange Name NASDAQ    
Entity Incorporation, State or Country Code AZ    
Document Annual Report true    
Document Transition Report false    
Documents Incorporated by Reference

Portions of the Definitive Proxy Statement related to the registrant’s 2026 Annual Meeting of Shareholders, which Proxy Statement will be filed under the Securities Exchange Act of 1934, as amended, within 120 days of the end of the registrant’s fiscal year ended September 30, 2025, are incorporated by reference into Items 10-14 of Part III of this Form 10-K.

    
ICFR Auditor Attestation Flag false    
Document Financial Statement Error Correction [Flag] false    
Auditor Firm ID 185    
Auditor Location Phoenix, Arizona    
Auditor Name KPMG LLP    
Auditor Opinion

Opinion on the Consolidated Financial Statements

We have audited the accompanying consolidated balance sheets of Amtech Systems, Inc. and subsidiaries (the Company) as of September 30, 2025 and 2024, the related consolidated statements of operations, comprehensive income (loss), shareholders’ equity, and cash flows for each of the years in the two-year period ended September 30, 2025, and the related notes (collectively, the consolidated financial statements). In our opinion, the consolidated financial statements present fairly, in all material respects, the financial position of the Company as of September 30, 2025 and 2024, and the results of its operations and its cash flows for each of the years in the two-year period ended September 30, 2025, in conformity with U.S. generally accepted accounting principles.