<SEC-DOCUMENT>0001193125-14-451490-index.html : 20141223
<SEC-HEADER>0001193125-14-451490.hdr.sgml : 20141223
<ACCEPTANCE-DATETIME>20141223060615
ACCESSION NUMBER:		0001193125-14-451490
CONFORMED SUBMISSION TYPE:	DEFM14A
PUBLIC DOCUMENT COUNT:		9
FILED AS OF DATE:		20141223
DATE AS OF CHANGE:		20141223
EFFECTIVENESS DATE:		20141223

FILER:

	COMPANY DATA:	
		COMPANY CONFORMED NAME:			AMTECH SYSTEMS INC
		CENTRAL INDEX KEY:			0000720500
		STANDARD INDUSTRIAL CLASSIFICATION:	SPECIAL INDUSTRY MACHINERY, NEC [3559]
		IRS NUMBER:				860411215
		STATE OF INCORPORATION:			AZ
		FISCAL YEAR END:			0930

	FILING VALUES:
		FORM TYPE:		DEFM14A
		SEC ACT:		1934 Act
		SEC FILE NUMBER:	000-11412
		FILM NUMBER:		141304608

	BUSINESS ADDRESS:	
		STREET 1:		131 S CLARK DR
		CITY:			TEMPE
		STATE:			AZ
		ZIP:			85281
		BUSINESS PHONE:		6029675146

	MAIL ADDRESS:	
		STREET 1:		131 SOUTH CLARK DRIVE
		CITY:			TEMPE
		STATE:			AZ
		ZIP:			85281

	FORMER COMPANY:	
		FORMER CONFORMED NAME:	QUARTZ ENGINEERING & MATERIALS INC
		DATE OF NAME CHANGE:	19870715
</SEC-HEADER>
<DOCUMENT>
<TYPE>DEFM14A
<SEQUENCE>1
<FILENAME>d808649ddefm14a.htm
<DESCRIPTION>DEFINITIVE PROXY STATEMENT
<TEXT>
Document 1 - file: d808649ddefm14a.htm

</DOCUMENT>
<DOCUMENT>
<TYPE>GRAPHIC
<SEQUENCE>2
<FILENAME>g808649g10m86.jpg
<DESCRIPTION>GRAPHIC
<TEXT>
Document 2 - file: g808649g10m86.jpg

</DOCUMENT>
<DOCUMENT>
<TYPE>GRAPHIC
<SEQUENCE>3
<FILENAME>g808649g16y69.jpg
<DESCRIPTION>GRAPHIC
<TEXT>
Document 3 - file: g808649g16y69.jpg

</DOCUMENT>
<DOCUMENT>
<TYPE>GRAPHIC
<SEQUENCE>4
<FILENAME>g808649g26e14.jpg
<DESCRIPTION>GRAPHIC
<TEXT>
Document 4 - file: g808649g26e14.jpg

</DOCUMENT>
<DOCUMENT>
<TYPE>GRAPHIC
<SEQUENCE>5
<FILENAME>g808649g49f18.jpg
<DESCRIPTION>GRAPHIC
<TEXT>
Document 5 - file: g808649g49f18.jpg

</DOCUMENT>
<DOCUMENT>
<TYPE>GRAPHIC
<SEQUENCE>6
<FILENAME>g808649g92j69.jpg
<DESCRIPTION>GRAPHIC
<TEXT>
Document 6 - file: g808649g92j69.jpg

</DOCUMENT>
<DOCUMENT>
<TYPE>GRAPHIC
<SEQUENCE>7
<FILENAME>g808649g93m89.jpg
<DESCRIPTION>GRAPHIC
<TEXT>
Document 7 - file: g808649g93m89.jpg

</DOCUMENT>
<DOCUMENT>
<TYPE>GRAPHIC
<SEQUENCE>8
<FILENAME>g808649img01.jpg
<DESCRIPTION>GRAPHIC
<TEXT>
Document 8 - file: g808649img01.jpg

</DOCUMENT>
<DOCUMENT>
<TYPE>GRAPHIC
<SEQUENCE>9
<FILENAME>g808649img02.jpg
<DESCRIPTION>GRAPHIC
<TEXT>
Document 9 - file: g808649img02.jpg

</DOCUMENT>
</SEC-DOCUMENT>