<SEC-DOCUMENT>0001193125-14-447357-index.html : 20141219
<SEC-HEADER>0001193125-14-447357.hdr.sgml : 20141219
<ACCEPTANCE-DATETIME>20141219060149
ACCESSION NUMBER:		0001193125-14-447357
CONFORMED SUBMISSION TYPE:	S-4/A
PUBLIC DOCUMENT COUNT:		24
FILED AS OF DATE:		20141219
DATE AS OF CHANGE:		20141219

FILER:

	COMPANY DATA:	
		COMPANY CONFORMED NAME:			AMTECH SYSTEMS INC
		CENTRAL INDEX KEY:			0000720500
		STANDARD INDUSTRIAL CLASSIFICATION:	SPECIAL INDUSTRY MACHINERY, NEC [3559]
		IRS NUMBER:				860411215
		STATE OF INCORPORATION:			AZ
		FISCAL YEAR END:			0930

	FILING VALUES:
		FORM TYPE:		S-4/A
		SEC ACT:		1933 Act
		SEC FILE NUMBER:	333-200558
		FILM NUMBER:		141297596

	BUSINESS ADDRESS:	
		STREET 1:		131 S CLARK DR
		CITY:			TEMPE
		STATE:			AZ
		ZIP:			85281
		BUSINESS PHONE:		6029675146

	MAIL ADDRESS:	
		STREET 1:		131 SOUTH CLARK DRIVE
		CITY:			TEMPE
		STATE:			AZ
		ZIP:			85281

	FORMER COMPANY:	
		FORMER CONFORMED NAME:	QUARTZ ENGINEERING & MATERIALS INC
		DATE OF NAME CHANGE:	19870715
</SEC-HEADER>
<DOCUMENT>
<TYPE>S-4/A
<SEQUENCE>1
<FILENAME>d808649ds4a.htm
<DESCRIPTION>AMENDMENT NO. 1 TO FORM S-4
<TEXT>
Document 1 - file: d808649ds4a.htm
</DOCUMENT> <DOCUMENT> <TYPE>EX-5.1 <SEQUENCE>2 <FILENAME>d808649dex51.htm <DESCRIPTION>EX-5.1 <TEXT> Document 2 - file: d808649dex51.htm
</DOCUMENT> <DOCUMENT> <TYPE>EX-8.1 <SEQUENCE>3 <FILENAME>d808649dex81.htm <DESCRIPTION>EX-8.1 <TEXT> Document 3 - file: d808649dex81.htm
</DOCUMENT> <DOCUMENT> <TYPE>EX-8.2 <SEQUENCE>4 <FILENAME>d808649dex82.htm <DESCRIPTION>EX-8.2 <TEXT> Document 4 - file: d808649dex82.htm
</DOCUMENT> <DOCUMENT> <TYPE>EX-23.4 <SEQUENCE>5 <FILENAME>d808649dex234.htm <DESCRIPTION>EX-23.4 <TEXT> Document 5 - file: d808649dex234.htm
</DOCUMENT> <DOCUMENT> <TYPE>EX-23.7 <SEQUENCE>6 <FILENAME>d808649dex237.htm <DESCRIPTION>EX-23.7 <TEXT> Document 6 - file: d808649dex237.htm
</DOCUMENT> <DOCUMENT> <TYPE>EX-24.1 <SEQUENCE>7 <FILENAME>d808649dex241.htm <DESCRIPTION>EX-24.1 <TEXT> Document 7 - file: d808649dex241.htm
</DOCUMENT> <DOCUMENT> <TYPE>EX-99.1 <SEQUENCE>8 <FILENAME>d808649dex991.htm <DESCRIPTION>EX-99.1 <TEXT> Document 8 - file: d808649dex991.htm
</DOCUMENT> <DOCUMENT> <TYPE>EX-99.2 <SEQUENCE>9 <FILENAME>d808649dex992.htm <DESCRIPTION>EX-99.2 <TEXT> Document 9 - file: d808649dex992.htm
</DOCUMENT> <DOCUMENT> <TYPE>EX-99.4 <SEQUENCE>10 <FILENAME>d808649dex994.htm <DESCRIPTION>EX-99.4 <TEXT> Document 10 - file: d808649dex994.htm
</DOCUMENT> <DOCUMENT> <TYPE>EX-99.5 <SEQUENCE>11 <FILENAME>d808649dex995.htm <DESCRIPTION>EX-99.5 <TEXT> Document 11 - file: d808649dex995.htm
</DOCUMENT> <DOCUMENT> <TYPE>GRAPHIC <SEQUENCE>12 <FILENAME>g8086491_ex81.jpg <DESCRIPTION>GRAPHIC <TEXT> Document 12 - file: g8086491_ex81.jpg
</DOCUMENT> <DOCUMENT> <TYPE>GRAPHIC <SEQUENCE>13 <FILENAME>g8086491_ex82.jpg <DESCRIPTION>GRAPHIC <TEXT> Document 13 - file: g8086491_ex82.jpg
</DOCUMENT> <DOCUMENT> <TYPE>GRAPHIC <SEQUENCE>14 <FILENAME>g8086492_ex82.jpg <DESCRIPTION>GRAPHIC <TEXT> Document 14 - file: g8086492_ex82.jpg
</DOCUMENT> <DOCUMENT> <TYPE>GRAPHIC <SEQUENCE>15 <FILENAME>g808649ex23_5pg001.jpg <DESCRIPTION>GRAPHIC <TEXT> Document 15 - file: g808649ex23_5pg001.jpg
</DOCUMENT> <DOCUMENT> <TYPE>GRAPHIC <SEQUENCE>16 <FILENAME>g808649ex5_1pg001.jpg <DESCRIPTION>GRAPHIC <TEXT> Document 16 - file: g808649ex5_1pg001.jpg
</DOCUMENT> <DOCUMENT> <TYPE>GRAPHIC <SEQUENCE>17 <FILENAME>g808649ex99_1pg001.jpg <DESCRIPTION>GRAPHIC <TEXT> Document 17 - file: g808649ex99_1pg001.jpg
</DOCUMENT> <DOCUMENT> <TYPE>GRAPHIC <SEQUENCE>18 <FILENAME>g808649ex99_2pg001.jpg <DESCRIPTION>GRAPHIC <TEXT> Document 18 - file: g808649ex99_2pg001.jpg
</DOCUMENT> <DOCUMENT> <TYPE>GRAPHIC <SEQUENCE>19 <FILENAME>g808649g10m86.jpg <DESCRIPTION>GRAPHIC <TEXT> Document 19 - file: g808649g10m86.jpg
</DOCUMENT> <DOCUMENT> <TYPE>GRAPHIC <SEQUENCE>20 <FILENAME>g808649g16y69.jpg <DESCRIPTION>GRAPHIC <TEXT> Document 20 - file: g808649g16y69.jpg
</DOCUMENT> <DOCUMENT> <TYPE>GRAPHIC <SEQUENCE>21 <FILENAME>g808649g26e14.jpg <DESCRIPTION>GRAPHIC <TEXT> Document 21 - file: g808649g26e14.jpg
</DOCUMENT> <DOCUMENT> <TYPE>GRAPHIC <SEQUENCE>22 <FILENAME>g808649g49f18.jpg <DESCRIPTION>GRAPHIC <TEXT> Document 22 - file: g808649g49f18.jpg
</DOCUMENT> <DOCUMENT> <TYPE>GRAPHIC <SEQUENCE>23 <FILENAME>g808649g92j69.jpg <DESCRIPTION>GRAPHIC <TEXT> Document 23 - file: g808649g92j69.jpg
</DOCUMENT> <DOCUMENT> <TYPE>GRAPHIC <SEQUENCE>24 <FILENAME>g808649g93m89.jpg <DESCRIPTION>GRAPHIC <TEXT> Document 24 - file: g808649g93m89.jpg
</DOCUMENT> </SEC-DOCUMENT>