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Proc-Type: 2001,MIC-CLEAR
Originator-Name: webmaster@www.sec.gov
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MIC-Info: RSA-MD5,RSA,
 E72qTwOSkcbpLWH2O8eJKSVLLtIYw+9s9xyMvDNTPlGWp9AfUz5f0hZ1MPr372NJ
 w8pHtLeILBVFPDr/AAR1oA==

<SEC-DOCUMENT>0001005477-05-003899.txt : 20051114
<SEC-HEADER>0001005477-05-003899.hdr.sgml : 20051111
<ACCEPTANCE-DATETIME>20051114061916
ACCESSION NUMBER:		0001005477-05-003899
CONFORMED SUBMISSION TYPE:	3
PUBLIC DOCUMENT COUNT:		1
CONFORMED PERIOD OF REPORT:	20051027
FILED AS OF DATE:		20051114
DATE AS OF CHANGE:		20051114

REPORTING-OWNER:	

	OWNER DATA:	
		COMPANY CONFORMED NAME:			FIRESTONE LAWRENCE
		CENTRAL INDEX KEY:			0001112888

	FILING VALUES:
		FORM TYPE:		3
		SEC ACT:		1934 Act
		SEC FILE NUMBER:	000-11412
		FILM NUMBER:		051195950

	BUSINESS ADDRESS:	
		BUSINESS PHONE:		303-774-3200

	MAIL ADDRESS:	
		STREET 1:		C/O APPLIED FILMS CORP
		STREET 2:		9586 I-25 FRONTAGE ROAD
		CITY:			LONGMONT
		STATE:			CO
		ZIP:			80504

ISSUER:		

	COMPANY DATA:	
		COMPANY CONFORMED NAME:			AMTECH SYSTEMS INC
		CENTRAL INDEX KEY:			0000720500
		STANDARD INDUSTRIAL CLASSIFICATION:	SPECIAL INDUSTRY MACHINERY, NEC [3559]
		IRS NUMBER:				860411215
		STATE OF INCORPORATION:			AZ
		FISCAL YEAR END:			0930

	BUSINESS ADDRESS:	
		STREET 1:		131 S CLARK DR
		CITY:			TEMPE
		STATE:			AZ
		ZIP:			85281
		BUSINESS PHONE:		6029675146

	MAIL ADDRESS:	
		STREET 1:		131 SOUTH CLARK DRIVE
		CITY:			TEMPE
		STATE:			AZ
		ZIP:			85281

	FORMER COMPANY:	
		FORMER CONFORMED NAME:	QUARTZ ENGINEERING & MATERIALS INC
		DATE OF NAME CHANGE:	19870715
</SEC-HEADER>
<DOCUMENT>
<TYPE>3
<SEQUENCE>1
<FILENAME>edgar123.xml
<DESCRIPTION>FORM 3
<TEXT>
<XML>
<?xml version="1.0"?>
<ownershipDocument>

    <schemaVersion>X0202</schemaVersion>

    <documentType>3</documentType>

    <periodOfReport>2005-10-27</periodOfReport>

    <noSecuritiesOwned>0</noSecuritiesOwned>

    <issuer>
        <issuerCik>0000720500</issuerCik>
        <issuerName>AMTECH SYSTEMS INC</issuerName>
        <issuerTradingSymbol>ASYS</issuerTradingSymbol>
    </issuer>

    <reportingOwner>
        <reportingOwnerId>
            <rptOwnerCik>0001112888</rptOwnerCik>
            <rptOwnerName>FIRESTONE LAWRENCE</rptOwnerName>
        </reportingOwnerId>
        <reportingOwnerAddress>
            <rptOwnerStreet1>C/O APPLIED FILMS CORP</rptOwnerStreet1>
            <rptOwnerStreet2>9586 I-25 FRONTAGE ROAD</rptOwnerStreet2>
            <rptOwnerCity>LONGMONT</rptOwnerCity>
            <rptOwnerState>CO</rptOwnerState>
            <rptOwnerZipCode>80504</rptOwnerZipCode>
            <rptOwnerStateDescription></rptOwnerStateDescription>
        </reportingOwnerAddress>
        <reportingOwnerRelationship>
            <isDirector>1</isDirector>
            <isOfficer>0</isOfficer>
            <isTenPercentOwner>0</isTenPercentOwner>
            <isOther>0</isOther>
        </reportingOwnerRelationship>
    </reportingOwner>

    <derivativeTable>
        <derivativeHolding>
            <securityTitle>
                <value>Non-Employee Director Stock Option</value>
                <footnoteId id="F1"/>
            </securityTitle>
            <conversionOrExercisePrice>
                <value>5.41</value>
            </conversionOrExercisePrice>
            <exerciseDate>
                <value>2006-10-27</value>
                <footnoteId id="F2"/>
            </exerciseDate>
            <expirationDate>
                <value>2015-10-27</value>
                <footnoteId id="F3"/>
            </expirationDate>
            <underlyingSecurity>
                <underlyingSecurityTitle>
                    <value>Amtech Systems, Inc. $.01 par value common stock</value>
                </underlyingSecurityTitle>
                <underlyingSecurityShares>
                    <value>6000</value>
                </underlyingSecurityShares>
            </underlyingSecurity>
            <ownershipNature>
                <directOrIndirectOwnership>
                    <value>D</value>
                </directOrIndirectOwnership>
            </ownershipNature>
        </derivativeHolding>
    </derivativeTable>

    <footnotes>
        <footnote id="F1">Option to purchase Amtech Systems, Inc., $.01 par value common stock.</footnote>
        <footnote id="F2">One-third of the stock options granted vest on each of the first three anniversaries of the grant date.</footnote>
        <footnote id="F3">Any unexercised stock options expire 90 days after membership on the Board of Directors terminate, except that the expiration is one year from the date of termination if such termination is the result of death, or the Board of Directors exercises its discretion to the set another period for expiration at the time of termination.</footnote>
    </footnotes>

    <ownerSignature>
        <signatureName>Robert T. Hass, as Attorney-In-Fact for Lawrence Firestone</signatureName>
        <signatureDate>2005-11-07</signatureDate>
    </ownerSignature>
</ownershipDocument>
</XML>
</TEXT>
</DOCUMENT>
</SEC-DOCUMENT>
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