Goodwill and Intangible Assets - Additional Information (Details) - USD ($)	3 Months Ended			6 Months Ended		12 Months Ended
	Mar. 31, 2025	Mar. 31, 2024	Dec. 31, 2023	Mar. 31, 2025	Mar. 31, 2024	Sep. 30, 2024	Jan. 17, 2023
Finite-Lived Intangible Assets [Line Items]
Amortization of Intangible Assets	$ 100,000	$ 200,000		$ 300,000	$ 500,000
Impairment of goodwill	20,353,000			20,353,000	$ 6,370,000	$ 6,400,000
Goodwill	908,000			908,000		21,261,000
Semiconductor Fabrication Solutions Segment
Finite-Lived Intangible Assets [Line Items]
Total impairment charge	2,600,000		$ 1,300,000
Impairment of goodwill	15,400,000		6,400,000	15,356,000
Goodwill	0			0		15,356,000
Semiconductor Fabrication Solutions Segment | Entrepix, Inc.
Finite-Lived Intangible Assets [Line Items]
Goodwill							$ 16,500,000
Semiconductor Fabrication Solutions Segment | Customer Relationships
Finite-Lived Intangible Assets [Line Items]
Total impairment charge	1,800,000
Semiconductor Fabrication Solutions Segment | Trade names
Finite-Lived Intangible Assets [Line Items]
Total impairment charge	800,000
Thermal Processing Solutions Segment
Finite-Lived Intangible Assets [Line Items]
Impairment of goodwill	5,000,000		$ 0	4,997,000
Goodwill	$ 908,000			$ 908,000		$ 5,905,000