Goodwill - Additional Information (Details) - USD ($) $ in Thousands	12 Months Ended
	Sep. 30, 2024	Sep. 30, 2023	Jan. 17, 2023
Goodwill [Line Items]
Impairment of goodwill	$ 6,370
Goodwill	21,261	$ 27,631
Entrepix, Inc.
Goodwill [Line Items]
Goodwill		16,463
Semiconductor Fabrication Solutions
Goodwill [Line Items]
Impairment of goodwill	6,370
Goodwill	$ 15,356	$ 21,726
Semiconductor Fabrication Solutions | Entrepix, Inc.
Goodwill [Line Items]
Goodwill			$ 16,500