Inventories - Additional Information (Details) - USD ($) $ in Thousands	12 Months Ended
	Sep. 30, 2024	Sep. 30, 2023	Sep. 30, 2022
Inventory [Line Items]
Write-down of inventory	$ 2,813	$ 2,620	$ 102
Semiconductor Fabrication Solutions
Inventory [Line Items]
Write-down of inventory	$ 400	$ 1,500