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Inventories
 12 Months Ended
Sep. 30, 2024
Inventory Disclosure [Abstract]  
Inventories

5. Inventories

 

The components of inventories are as follows, in thousands:

 

 

 

September 30,

 

 

 

2024

 

 

2023

 

Purchased parts and raw materials

 

$

17,958

 

 

$

22,627

 

Work-in-process

 

 

6,934

 

 

 

7,774

 

Finished goods

 

 

1,975

 

 

 

4,444

 

 

 

$

26,867

 

 

$

34,845

 

 

In the Semiconductor Fabrication Solutions segment, we recorded $0.4 million and $1.5 million related to the write-off of inventory for our polishing machine products in the years ended September 30, 2024 and 2023, respectively.