Goodwill - Additional Information (Details) - USD ($)	12 Months Ended
	Sep. 30, 2023	Jan. 17, 2023	Sep. 30, 2022
Goodwill [Line Items]
Goodwill	$ 27,631,000		$ 11,168,000
Entrepix, Inc.
Goodwill [Line Items]
Goodwill	16,463,000
Semiconductor and Material and Substrate
Goodwill [Line Items]
Impairment of goodwill	0
Material and Substrate
Goodwill [Line Items]
Goodwill	$ 21,726,000		$ 5,263,000
Material and Substrate | Entrepix, Inc.
Goodwill [Line Items]
Goodwill		$ 16,500,000