Leases - Additional Information (Details) - USD ($) $ in Thousands	12 Months Ended
	Sep. 30, 2023	Jun. 30, 2024	Sep. 30, 2022
Lessee Lease Description [Line Items]
Operating lease, existence of option to extend	true
Operating lease, option to extend lease terms, description	Operating lease payments include $2.3 million related to options to extend lease terms that are reasonably certain of being exercised. During 2023, we reassessed the options to extend the term of the lease on our manufacturing facility in Carlisle, Pennsylvania, and determined it was not reasonably certain that Amtech would exercise those options. As a result, we reduced our ROU Asset and the related ROU Operating Lease liability by $2.7 million.
Payments related to options to extend lease terms	$ 2,300
Operating lease liability	11,631
Operating lease ROU asset	11,217		$ 11,258
Reduction in ROU asset	(2,700)
Reduction in ROU operating lease liability	$ (2,700)
Forecast
Lessee Lease Description [Line Items]
Operating lease liability		$ 7,100
Operating lease ROU asset		$ 7,100