Severance (Tables)

12 Months Ended

Sep. 30, 2023

Restructuring and Related Activities [Abstract]

Schedule of Severance

The activity during 2021 is the result of staff reductions in our Semiconductor and Material and Substrate operations. The outstanding obligations as of and for the years ended September 30, 2023, 2022 and 2021 are as follows, in thousands:

	Years Ended September 30,
	2023			2022			2021
Balance at beginning of the year	$	—		$	17		$	102
Severance expense, net of adjustments		665			—			86
Cash payments		(511	)		(17	)		(171	)
Balance at the end of the year	$	154		$	—		$	17