Supplementary Financial Information - Summary of Activity in Allowance for Doubtful Accounts (Details) - USD ($) $ in Thousands	12 Months Ended
Sep. 30, 2022	Sep. 30, 2021	Sep. 30, 2020
Allowance for Doubtful Accounts Receivable [Roll Forward]
Balance at beginning of year	$ 188	$ 159	$ 172
Provision	(34)	44	86
Write offs	(6)	(2)	(26)
Adjustment	(46)	(13)	(73)
Balance at end of year	$ 114	$ 188	$ 159

Accounts receivable allowance for credit loss adjustment.

No definition available.

Name:	asys_AccountsReceivableAllowanceForCreditLossAdjustment
Namespace Prefix:	asys_
Data Type:	xbrli:monetaryItemType
Balance Type:	na
Period Type:	duration

- Definition

Provision for doubtful accounts net of foreign exchange currency adjustment.

+ References

No definition available.

+ Details

Name:	asys_ProvisionForDoubtfulAccountsNetOfForeignExchangeCurrencyAdjustment
Namespace Prefix:	asys_
Data Type:	xbrli:monetaryItemType
Balance Type:	debit
Period Type:	duration

- Definition

Amount of allowance for credit loss on accounts receivable, classified as current.

+ References

Reference 1: http://www.xbrl.org/2003/role/disclosureRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 310
-SubTopic 10
-Section 50
-Paragraph 4
-URI https://asc.fasb.org/extlink&oid=123577603&loc=d3e5074-111524

Reference 2: http://www.xbrl.org/2003/role/disclosureRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 326
-SubTopic 20
-Section 45
-Paragraph 1
-URI https://asc.fasb.org/extlink&oid=124255206&loc=SL82895884-210446

Reference 3: http://www.xbrl.org/2003/role/disclosureRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 210
-SubTopic 10
-Section S99
-Paragraph 1
-Subparagraph (SX 210.5-02(4))
-URI https://asc.fasb.org/extlink&oid=120391452&loc=d3e13212-122682

+ Details

Name:	us-gaap_AllowanceForDoubtfulAccountsReceivableCurrent
Namespace Prefix:	us-gaap_
Data Type:	xbrli:monetaryItemType
Balance Type:	credit
Period Type:	instant

- Definition

A roll forward is a reconciliation of a concept from the beginning of a period to the end of a period.

+ References

No definition available.

+ Details

Name:	us-gaap_AllowanceForDoubtfulAccountsReceivableRollforward
Namespace Prefix:	us-gaap_
Data Type:	xbrli:stringItemType
Balance Type:	na
Period Type:	duration

- Definition

Amount of direct write-downs of accounts receivable charged against the allowance.

+ References

Reference 1: http://www.xbrl.org/2003/role/disclosureRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 326
-SubTopic 20
-Section 50
-Paragraph 13
-Subparagraph (d)
-URI https://asc.fasb.org/extlink&oid=124255953&loc=SL82919249-210447

+ Details

Name:	us-gaap_AllowanceForDoubtfulAccountsReceivableWriteOffs
Namespace Prefix:	us-gaap_
Data Type:	xbrli:monetaryItemType
Balance Type:	debit
Period Type:	duration