Amount of loss from the write-down of an asset representing the future economic benefits arising from other assets acquired in a business combination that are not individually identified and separately recognized.

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Name:	us-gaap_GoodwillImpairmentLoss
Namespace Prefix:	us-gaap_
Data Type:	xbrli:monetaryItemType
Balance Type:	debit
Period Type:	duration

Goodwill - Additional Information (Details) - USD ($)	12 Months Ended
Goodwill - Additional Information (Details) - USD ($)	Sep. 30, 2021	Mar. 03, 2021	Sep. 30, 2020
Goodwill [Line Items]
Goodwill	$ 11,168,000		$ 6,633,000
Intersurface Dynamics, Inc.
Goodwill [Line Items]
Goodwill		$ 4,500,000
Semiconductor
Goodwill [Line Items]
Impairment of goodwill	0
Goodwill	5,905,000		5,905,000
Material and Substrate
Goodwill [Line Items]
Impairment of goodwill	0
Goodwill	$ 5,263,000		$ 728,000
Material and Substrate \| Intersurface Dynamics, Inc.
Goodwill [Line Items]
Goodwill		$ 4,500,000