Leases - Additional Information (Details) $ in Millions	12 Months Ended
Sep. 30, 2021 USD ($)
Lessee Lease Description [Line Items]
Operating lease, existence of option to extend	true
Operating lease, option to extend lease terms, description	Operating lease payments include $6.4 million related to options to extend lease terms that are reasonably certain of being exercised.
Payments related to options to extend lease terms	$ 6.4

Lessee Payments for optional lease extension periods that have not yet been exercised but are reasonably likely to be exercised.

No definition available.

+ Details

Name:	asys_LesseePaymentsInOptionalExtensionPeriods
Namespace Prefix:	asys_
Data Type:	xbrli:monetaryItemType
Balance Type:	credit
Period Type:	duration

- Definition

Line items represent financial concepts included in a table. These concepts are used to disclose reportable information associated with domain members defined in one or many axes to the table.

+ References

No definition available.

+ Details

Name:	us-gaap_LesseeLeaseDescriptionLineItems
Namespace Prefix:	us-gaap_
Data Type:	xbrli:stringItemType
Balance Type:	na
Period Type:	duration

- Definition

Indicates (true false) whether lessee has option to extend operating lease.

+ References

Reference 1: http://www.xbrl.org/2003/role/disclosureRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 842
-SubTopic 20
-Section 50
-Paragraph 3
-Subparagraph (a)(3)
-URI http://asc.fasb.org/extlink&oid=123408670&loc=SL77918673-209980

+ Details

Name:	us-gaap_LesseeOperatingLeaseExistenceOfOptionToExtend
Namespace Prefix:	us-gaap_
Data Type:	xbrli:booleanItemType
Balance Type:	na
Period Type:	duration

- Definition

Description of terms and conditions of option to extend lessee's operating lease. Includes, but is not limited to, information about option recognized as part of right-of-use asset and lease liability.

+ References

+ Details

Name:	us-gaap_LesseeOperatingLeaseOptionToExtend
Namespace Prefix:	us-gaap_
Data Type:	xbrli:stringItemType
Balance Type:	na
Period Type:	duration