Restructuring Plans (Tables)

12 Months Ended

Sep. 30, 2021

Restructuring And Related Activities [Abstract]

Schedule of Restructuring Activity

The table below details the restructuring activity for the years ended September 30, 2021 and 2020. The activity during 2020 is the result of staff reductions at our Massachusetts operations as we evaluated staffing across our Semiconductor operations. The activity during 2021 relates to staff reductions in our Semiconductor and Material and Substrate operations. The outstanding obligations as of September 30, 2021 and 2020 are as follows, in thousands:

	Years Ended September 30,
	2021			2020
Balance at beginning of the year	$	102		$	40
Severance expense, net of adjustments		86			217
Cash payments		(171	)		(155	)
Balance at the end of the year	$	17		$	102