<SEC-DOCUMENT>0000919574-19-007627-index.html : 20191211
<SEC-HEADER>0000919574-19-007627.hdr.sgml : 20191211
<ACCEPTANCE-DATETIME>20191210200330
ACCESSION NUMBER:		0000919574-19-007627
CONFORMED SUBMISSION TYPE:	SC 13D
PUBLIC DOCUMENT COUNT:		1
FILED AS OF DATE:		20191211
DATE AS OF CHANGE:		20191210

SUBJECT COMPANY:	

	COMPANY DATA:	
		COMPANY CONFORMED NAME:			AMTECH SYSTEMS INC
		CENTRAL INDEX KEY:			0000720500
		STANDARD INDUSTRIAL CLASSIFICATION:	SPECIAL INDUSTRY MACHINERY, NEC [3559]
		IRS NUMBER:				860411215
		STATE OF INCORPORATION:			AZ
		FISCAL YEAR END:			0930

	FILING VALUES:
		FORM TYPE:		SC 13D
		SEC ACT:		1934 Act
		SEC FILE NUMBER:	005-39482
		FILM NUMBER:		191278774

	BUSINESS ADDRESS:	
		STREET 1:		131 SOUTH CLARK DRIVE
		CITY:			TEMPE
		STATE:			AZ
		ZIP:			85281
		BUSINESS PHONE:		4809675146

	MAIL ADDRESS:	
		STREET 1:		131 SOUTH CLARK DRIVE
		CITY:			TEMPE
		STATE:			AZ
		ZIP:			85281

	FORMER COMPANY:	
		FORMER CONFORMED NAME:	QUARTZ ENGINEERING & MATERIALS INC
		DATE OF NAME CHANGE:	19870715

FILED BY:		

	COMPANY DATA:	
		COMPANY CONFORMED NAME:			Harbert Discovery Fund, LP
		CENTRAL INDEX KEY:			0001626127
		IRS NUMBER:				000000000
		STATE OF INCORPORATION:			DE
		FISCAL YEAR END:			1231

	FILING VALUES:
		FORM TYPE:		SC 13D

	BUSINESS ADDRESS:	
		STREET 1:		HARBERT DISCOVERY FUND GP, LLC
		STREET 2:		2100 THIRD AVENUE NORTH, SUITE 600
		CITY:			BIRMINGHAM
		STATE:			AL
		ZIP:			35203
		BUSINESS PHONE:		205-987-5500

	MAIL ADDRESS:	
		STREET 1:		HARBERT DISCOVERY FUND GP, LLC
		STREET 2:		2100 THIRD AVENUE NORTH, SUITE 600
		CITY:			BIRMINGHAM
		STATE:			AL
		ZIP:			35203

	FORMER COMPANY:	
		FORMER CONFORMED NAME:	HARBERT MICROCAP PARTNERS FUND, LP
		DATE OF NAME CHANGE:	20141121
</SEC-HEADER>
<DOCUMENT>
<TYPE>SC 13D
<SEQUENCE>1
<FILENAME>d8428508_13-d.htm
<TEXT>
Document 1 - file: d8428508_13-d.htm

</DOCUMENT>
</SEC-DOCUMENT>