Contracts with Customers (Details)	9 Months Ended
	Jun. 30, 2019 segment
Disaggregation of Revenue [Line Items]
Number of reportable segments	3
Warranty period	12 months
Period of contract	1 year
Amortization period	1 year
Semiconductor | Minimum
Disaggregation of Revenue [Line Items]
Percentage of contract price	80.00%
Semiconductor | Maximum
Disaggregation of Revenue [Line Items]
Percentage of contract price	90.00%
Equipment Sales | Minimum
Disaggregation of Revenue [Line Items]
Warranty period	12 months
Equipment Sales | Maximum
Disaggregation of Revenue [Line Items]
Warranty period	24 months