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Related Party Transactions (Details) - USD ($)
$ in Thousands
3 Months Ended 12 Months Ended
Jun. 29, 2018
Mar. 31, 2016
Sep. 30, 2018
Sep. 30, 2017
Sep. 30, 2016
Jun. 30, 2017
Sep. 30, 2015
Sep. 16, 2015
Related Party Transaction [Line Items]                
Gain on sale of other assets     $ 2,883 $ 0 $ 2,576      
Kingstone Holding Company                
Related Party Transaction [Line Items]                
Ownership percentage             15.00%  
Exclusive Sales and Service Rights in Solar Ion Implant Equipment                
Related Party Transaction [Line Items]                
Proceeds from license fees received   $ 4,900            
Gain on sale of other assets         $ 2,600      
SoLayTec, B.V.                
Related Party Transaction [Line Items]                
Due to related party           $ 2,400    
Kingstone Hong Kong                
Related Party Transaction [Line Items]                
Remaining ownership percentage disposed of 15.00%              
Proceeds from sale of business $ 5,700              
Kingstone Hong Kong | Kingstone Holding Company                
Related Party Transaction [Line Items]                
Ownership percentage               15.00%