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Earnings Per Share & Diluted Earnings Per Share (Tables)
 12 Months Ended
Sep. 30, 2018
Earnings Per Share [Abstract]  
Schedule of Earnings Per Share, Basic and Diluted
A reconciliation of the denominators of the basic and diluted EPS calculations follows (in thousands, except per share amounts):
 
Years ended September 30,
 
2018
 
2017
 
2016
Numerator:
 
 
Net income (loss) attributable to Amtech Systems, Inc.
$
5,305

 
$
9,131

 
$
(7,008
)
 
 
 
 
 
 
Denominator:
 
 
 
 
 
Weighted-average shares used to compute basic EPS
14,833

 
13,378

 
13,168

Common stock equivalents (1)
232

 
123

 
—

Weighted-average shares used to compute diluted EPS
15,065

 
13,501

 
13,168

 
 
 
 
 
 
Basic income (loss) per share attributable to Amtech shareholders
$
0.36

 
$
0.68

 
$
(0.53
)
Diluted income (loss) per share attributable to Amtech shareholders
$
0.35

 
$
0.68

 
$
(0.53
)

(1) The number of common stock equivalents is calculated using the treasury stock method and the average market price during the period.