Ownership Rights, Results of Projects Developed Separately By Individual Parties

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Research and Development, Period Required for Equipment Repairs and Maintenance

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Research and Development, Required Contribution, Labor and Assets

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The total amount of the contingent obligation under letters of credit outstanding as of the reporting date.

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Amount of loss contingency liability.

+ References

Reference 1: http://www.xbrl.org/2003/role/presentationRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 450
-SubTopic 20
-Section 50
-Paragraph 1
-URI http://asc.fasb.org/extlink&oid=82911808&loc=d3e14326-108349

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The cash outflow associated with the acquisition of long-lived, physical assets that are used in the normal conduct of business to produce goods and services and not intended for resale; includes cash outflows to pay for construction of self-constructed assets.

+ References

Reference 1: http://www.xbrl.org/2003/role/presentationRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 230
-SubTopic 10
-Section 45
-Paragraph 13
-Subparagraph (c)
-URI http://asc.fasb.org/extlink&oid=98514028&loc=d3e3213-108585

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Minimum amount of purchase arrangement in which the entity has agreed to expend funds to procure goods or services from a supplier.

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Line items represent financial concepts included in a table. These concepts are used to disclose reportable information associated with domain members defined in one or many axes to the table.

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Commitments and Contingencies (Details) - USD ($) $ in Thousands	3 Months Ended		12 Months Ended
	Dec. 31, 2017	Dec. 31, 2016	Sep. 30, 2014	Sep. 30, 2017	Sep. 30, 2016
Schedule of Equity Method Investments [Line Items]
Purchase obligation	$ 26,400				$ 34,400
Price of an ion implanter	93	$ 86
Environmental Clean-up \| BTU International, Inc (BTU) Merger
Schedule of Equity Method Investments [Line Items]
Loss contingency accrual, less than	100			$ 100
Letter of credit	$ 200			$ 200
Tempress Systems and Energy Research Centre Agreement
Schedule of Equity Method Investments [Line Items]
Price of an ion implanter			$ 1,400
Ownership rights to results of projects developed separately by individual parties			100.00%
Required contribution in form of labor and assets			$ 1,400
Period from agreement start for contribution for project support			2 years