Carrying amount as of the balance sheet date of obligations due all related parties.

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Related Party Transactions (Details) - USD ($) $ in Thousands	3 Months Ended	12 Months Ended
	Mar. 31, 2016	Sep. 30, 2017	Sep. 30, 2016	Sep. 30, 2015	Jun. 30, 2017
Related Party Transaction [Line Items]
Gain on sale of other assets		$ 0	$ 2,576	$ 0
Kingstone Holding Company
Related Party Transaction [Line Items]
Ownership percentage				15.00%
Exclusive Sales and Service Rights in Solar Ion Implant Equipment
Related Party Transaction [Line Items]
Proceeds from license fees received	$ 4,900
Gain on sale of other assets			$ 2,600
SoLayTec, B.V.
Related Party Transaction [Line Items]
Due to related party					$ 2,400