The amount of the gain (loss) recognized by the parent and included in its attributable portion of net income for the period due to deconsolidation of a subsidiary or derecognition of a group of assets. The gain (loss) recognized and included in the net income attributable to the parent for the period is generally computed as the difference between: (a) the aggregate of: (1) the fair value of any consideration received; (2) the fair value of any retained noncontrolling investment in the former subsidiary at the date the subsidiary was deconsolidated; and (3) the carrying amount of any noncontrolling interest in the former subsidiary (including any accumulated other comprehensive income attributable to the noncontrolling interest) at the date the subsidiary was deconsolidated and (b) the carrying amount of the former subsidiary's assets and liabilities.

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Deconsolidation (Details) - USD ($) $ in Thousands	3 Months Ended	12 Months Ended
Deconsolidation (Details) - USD ($) $ in Thousands	Mar. 31, 2016	Sep. 30, 2017	Sep. 30, 2016	Sep. 30, 2015	Sep. 16, 2015
Income Statement, Balance Sheet and Additional Disclosures by Disposal Groups, Including Discontinued Operations [Line Items]
Gain on deconsolidation of Kingstone		$ 0	$ 0	$ 8,814
Gain on sale		$ 0	2,576	0
Kingstone
Income Statement, Balance Sheet and Additional Disclosures by Disposal Groups, Including Discontinued Operations [Line Items]
Gain on deconsolidation of Kingstone				$ 8,800
Exclusive Sales and Service Rights in Solar Ion Implant Equipment
Income Statement, Balance Sheet and Additional Disclosures by Disposal Groups, Including Discontinued Operations [Line Items]
Proceeds from license fees received	$ 4,900
Gain on sale			$ 2,600
Kingstone Holding Company
Income Statement, Balance Sheet and Additional Disclosures by Disposal Groups, Including Discontinued Operations [Line Items]
Ownership percentage				15.00%
Kingstone Holding Company \| Kingstone
Income Statement, Balance Sheet and Additional Disclosures by Disposal Groups, Including Discontinued Operations [Line Items]
Ownership percentage					15.00%