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Earnings Per Share & Diluted Earnings Per Share (Tables)
 12 Months Ended
Sep. 30, 2017
Earnings Per Share [Abstract]  
Schedule of Earnings Per Share, Basic and Diluted
 
Years ended September 30,
 
2017
 
2016
 
2015
 
(dollars in thousands, except per share amounts)
Basic Earnings Per Share Computation
 
 
Net income (loss) attributable to Amtech Systems, Inc.
$
9,131

 
$
(7,008
)
 
$
(7,771
)
Weighted Average Shares Outstanding:
 
 
 
 
 
Common stock
13,378

 
13,168

 
12,022

Basic income (loss) per share attributable to Amtech shareholders
$
0.68

 
$
(0.53
)
 
$
(0.65
)
Diluted Earnings Per Share Computation
 
 
 
 
 
Net income (loss) attributable to Amtech Systems, Inc.
$
9,131

 
$
(7,008
)
 
$
(7,771
)
Weighted Average Shares Outstanding:
 
 
 
 
 
Common stock
13,378

 
13,168

 
12,022

Common stock equivalents (1)
123

 
—

 
—

Diluted shares
13,501

 
13,168

 
12,022

Diluted income (loss) per share attributable to Amtech shareholders
$
0.68

 
$
(0.53
)
 
$
(0.65
)

(1) The number of common stock equivalents is calculated using the treasury stock method and the average market price during the period.