Ownership Rights, Results of Projects Developed Separately By Individual Parties

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Research and Development, Period Required for Equipment Repairs and Maintenance

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The total amount of the contingent obligation under letters of credit outstanding as of the reporting date.

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Amount of loss contingency liability.

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Reference 1: http://www.xbrl.org/2003/role/presentationRef
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-Name Accounting Standards Codification
-Topic 450
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-Section 50
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The amount of cash paid for the settlement of litigation or for other legal issues during the period.

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-Name Accounting Standards Codification
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The cash outflow associated with the acquisition of long-lived, physical assets that are used in the normal conduct of business to produce goods and services and not intended for resale; includes cash outflows to pay for construction of self-constructed assets.

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Minimum amount of purchase arrangement in which the entity has agreed to expend funds to procure goods or services from a supplier.

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Commitments and Contingencies (Details) $ in Thousands		6 Months Ended		12 Months Ended
Commitments and Contingencies (Details) $ in Thousands	Apr. 01, 2016 USD ($)	Mar. 31, 2017 USD ($) claims	Mar. 31, 2016 USD ($)	Sep. 30, 2014 USD ($)	Sep. 30, 2016 USD ($)
Schedule of Equity Method Investments [Line Items]
Purchase obligation		$ 29,100			$ 11,300
Price of an ion implanter		210	$ 192
Tempress Systems and Energy Research Centre Agreement
Schedule of Equity Method Investments [Line Items]
Price of an ion implanter				$ 1,400
Ownership rights to results of projects developed separately by individual parties				100.00%
Required contribution in form of labor and assets				$ 1,400
Period from agreement start for contribution for project support				2 years
Environmental Clean-up \| BTU International, Inc (BTU) Merger
Schedule of Equity Method Investments [Line Items]
Loss contingency accrual		100			$ 100
Letter of credit		$ 200
Stockholder Actions (Putative Stockholder Class Action Complaints) \| Settled Litigation
Schedule of Equity Method Investments [Line Items]
Number of settled claims \| claims		2
Legal settlement, payment of fees and expenses	$ 325