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Business Segment Information (Details)
$ in Thousands
3 Months Ended
Dec. 31, 2016
USD ($)
segment
Dec. 31, 2015
USD ($)
Sep. 30, 2016
USD ($)
Segment Reporting Information [Line Items]      
Number of business segments | segment 3    
Net revenues $ 29,135 $ 22,074  
Operating income (Loss) (180) (3,929)  
Identifiable assets $ 115,918   $ 118,430
Product Concentration Risk | Sales Revenue, Product Line | Semiconductor      
Segment Reporting Information [Line Items]      
Concentration risk, percentage (less than) 25.00%    
Operating Segments | Solar      
Segment Reporting Information [Line Items]      
Net revenues $ 11,424 9,543  
Operating income (Loss) (1,023) (1,864)  
Identifiable assets 43,334   42,962
Operating Segments | Semiconductor      
Segment Reporting Information [Line Items]      
Net revenues 15,703 10,700  
Operating income (Loss) 2,361 (160)  
Identifiable assets 51,898   51,985
Operating Segments | Polishing      
Segment Reporting Information [Line Items]      
Net revenues 2,008 1,831  
Operating income (Loss) 464 169  
Identifiable assets 4,906   4,819
Non-Segment      
Segment Reporting Information [Line Items]      
Operating income (Loss) (1,982) $ (2,074)  
Identifiable assets $ 15,780   $ 18,664